The Wion(t ) dependence follows the discharge power change Q(t)=U(t)⋅I(t)Q(t)=U(t)⋅I(t), where U and I are the voltage and discharge current. Their change during the pulse duration τ is determined by the type of power supply. In the case of repetitively-pulsed treatment it is reasonable to use average values.
In this study, two types of average power and ion current power density were used: averaging over a pulse Wimp=∫0τWion(t)dt and averaging over a period Wper=τνWimp=δWimp, where δ is the duty MK 0893 and ν is the pulse frequency.
4.1. Temperature evolution and its dependence on MSS power
In case of a repetitively-pulsed mode at Wper less than 103 W/cm2, a target is heated gradually, as the energy from plasma is accumulated. It takes place even in total thermal insulation of a target. At first, the temperature rises rapidly. After that its growth slows down due to an increase in energy losses for heat radiation. The balance between incoming and lost power is achieved. The temperature field in the target becomes stationary. It is determined by the period averaged power. The frequency of pulse repetition and power within an individual pulse do not influence the temperature field. Therefore, the results connected with an erosion increase due to evaporation component and obtained for the period averaged power can be expanded for MSS with different types of power supply (DC, mid- and high-frequency, and HIPIMS).
In this study, two types of average power and ion current power density were used: averaging over a pulse Wimp=∫0τWion(t)dt and averaging over a period Wper=τνWimp=δWimp, where δ is the duty MK 0893 and ν is the pulse frequency.
4.1. Temperature evolution and its dependence on MSS power
In case of a repetitively-pulsed mode at Wper less than 103 W/cm2, a target is heated gradually, as the energy from plasma is accumulated. It takes place even in total thermal insulation of a target. At first, the temperature rises rapidly. After that its growth slows down due to an increase in energy losses for heat radiation. The balance between incoming and lost power is achieved. The temperature field in the target becomes stationary. It is determined by the period averaged power. The frequency of pulse repetition and power within an individual pulse do not influence the temperature field. Therefore, the results connected with an erosion increase due to evaporation component and obtained for the period averaged power can be expanded for MSS with different types of power supply (DC, mid- and high-frequency, and HIPIMS).